Polytype Stability, Microstructural Evolution, And Impurities At The Interface Of Homoepitaxial 4H-Sic(1120) Thin Films Grown Via Hot-Wall Chemical Vapor Deposition.
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Book Details :
Polytype Stability, Microstructural Evolution, And Impurities At The Interface Of Homoepitaxial 4H-Sic(1120) Thin Films Grown Via Hot-Wall Chemical Vapor Deposition.